| W(CO)6 |
Tungsten hexacarbonyl |
| AlCl3 |
Aluminum trichloride |
| HfCl4 |
Hafnium tetrachloride |
| PDMATa |
Pentakis(dimethylamino) tantalum |
| TiCl4 |
Titanium tetrachloride |
| TDMATi |
Tetrakis(dimethylamino) titanium |
| MoO2Cl2 |
Molybdenyl dichloride |
| BTBMW |
Bis(tert-butylamino) bis(dimethylamino) tungsten |
| CCTBA*** |
Cyclopentadienyl-tert-butylamino compound |
| Sn Precursors |
|
| Mo Precursors |
|
| Nb Precursors |
|
| Ta / In / ETC New liquid precursors |
|
| GeH4 |
Germane |
| TEGa |
Triethylgallium |
| NO gas |
Nitric Oxide |
| TMGa |
Trimethylgallium |
| Custom-Designed Canister |
|
